The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
May. 17, 2012
Yuko Kiridoshi, Tokyo, JP;
Takehiko Naruoka, Tokyo, JP;
Yukio Nishimura, Tokyo, JP;
Yusuke Asano, Tokyo, JP;
Takanori Kawakami, Tokyo, JP;
Hiromitsu Nakashima, Tokyo, JP;
Yuko Kiridoshi, Tokyo, JP;
Takehiko Naruoka, Tokyo, JP;
Yukio Nishimura, Tokyo, JP;
Yusuke Asano, Tokyo, JP;
Takanori Kawakami, Tokyo, JP;
Hiromitsu Nakashima, Tokyo, JP;
JSR Corporation, Tokyo, JP;
Abstract
A radiation-sensitive resin composition includes a first polymer, a second polymer and a radiation-sensitive acid generator. The first polymer has a structure unit represented by a following formula (1-1), a structure unit represented by a following formula (1-2), or both thereof, and has a content of fluorine atoms of no less than 5% by mass to a total mass of the first polymer. The second polymer has an acid-dissociable group, and has a content of fluorine atoms of less than 5% by mass to a total mass of the second polymer.