The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2017
Filed:
Aug. 10, 2015
Globalfoundries Inc., Grand Caymay, KY;
Zhiguo Sun, Halfmoon, NY (US);
Qiang Fang, Ballston Lake, NY (US);
Huang Liu, Mechanicville, NY (US);
Haigou Huang, Rexford, NY (US);
Jiehui Shu, Clifton Park, NY (US);
Jin Ping Liu, Ballston Lake, NY (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Reducing liner corrosion during metallization of semiconductor devices at BEOL includes providing a starting metallization structure, the structure including a bottom layer of dielectric material with a via therein, a liner lining the via and extending over upper edges thereof, the lined via over filled with a conductive material, recessing the conductive material down to the liner, further selectively recessing the conductive material below the upper edges of the via without damaging the liner, and forming a cap of the liner material on the conductive material.