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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9581905 B1

PDFFull Text
Date of Patent:
Feb. 28, 2017

Filed:

Dec. 04, 2015

Composition for film formation, resist underlayer film and forming method thereof, pattern-forming method and compound

Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Shin-ya Nakafuji, Tokyo, JP;

Fumihiro Toyokawa, Tokyo, JP;

Goji Wakamatsu, Tokyo, JP;

Shingo Takasugi, Tokyo, JP;

Tooru Kimura, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Cynthia Hamilton

Int. Cl.
CPC ...
G03F 7/16 (2006.01); G03F 7/36 (2006.01); G03F 7/11 (2006.01); C07C 33/38 (2006.01); C07C 15/50 (2006.01); C08F 38/00 (2006.01); C07C 33/28 (2006.01); C07C 39/21 (2006.01); C07C 43/215 (2006.01); C07C 25/24 (2006.01); H01L 21/027 (2006.01); C07C 211/50 (2006.01); C07C 211/58 (2006.01); C07C 15/54 (2006.01); C07C 15/58 (2006.01); C07C 15/14 (2006.01); C07C 15/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C07C 15/14 (2013.01); C07C 15/18 (2013.01); C07C 15/50 (2013.01); C07C 15/54 (2013.01); C07C 15/58 (2013.01); C07C 25/24 (2013.01); C07C 33/28 (2013.01); C07C 33/38 (2013.01); C07C 39/21 (2013.01); C07C 43/215 (2013.01); C07C 211/50 (2013.01); C07C 211/58 (2013.01); C08F 38/00 (2013.01); G03F 7/168 (2013.01); G03F 7/36 (2013.01); H01L 21/0271 (2013.01);
Abstract

A composition for film formation includes a compound represented by formula (1) and a solvent. In the formula (1), R, Rand Reach independently represent a group represented by the formula (a). In the formula (a), Rrepresents a hydrogen atom, an aryl group, or an alkyl group unsubstituted or substituted with at least one of a hydroxy group and an aryl group. Rrepresents a single bond or an arylene group. A part or all of hydrogen atoms on an aromatic ring of the aryl group and the arylene group may be substituted with a halogen atom, a hydroxy group, an amino group, a sulfanyl group, or a monovalent organic group having 1 to 20 carbon atoms and not including an aromatic ring.

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