The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2017

Filed:

Oct. 19, 2015
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Michael G. Haverty, Mountain View, CA (US);

Sadasivan Shankar, Cupertino, CA (US);

Tahir Ghani, Portland, OR (US);

Seongjun Park, San Jose, CA (US);

Assignee:

INTEL CORPORATION, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 29/417 (2006.01); H01L 23/485 (2006.01); H01L 29/08 (2006.01); H01L 29/45 (2006.01); H01L 23/482 (2006.01); H01L 21/283 (2006.01); H01L 21/3205 (2006.01);
U.S. Cl.
CPC ...
H01L 29/41791 (2013.01); H01L 23/485 (2013.01); H01L 29/0895 (2013.01); H01L 29/456 (2013.01); H01L 29/7851 (2013.01); H01L 21/283 (2013.01); H01L 21/3205 (2013.01); H01L 23/482 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Techniques are disclosed for forming contacts in silicon semiconductor devices. In some embodiments, a transition layer forms a non-reactive interface with the silicon semiconductor contact surface. In some such cases, a conductive material provides the contacts and the material forming a non-reactive interface with the silicon surface. In other cases, a thin semiconducting or insulating layer provides the non-reactive interface with the silicon surface and is coupled to conductive material of the contacts. The techniques can be embodied, for instance, in planar or non-planar (e.g., double-gate and tri-gate FinFETs) transistor devices.


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