The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2017
Filed:
Feb. 21, 2014
Applicant:
Alchimer, Massy, FR;
Inventors:
Vincent Mevellec, Chaville, FR;
Dominique Suhr, Chatenay Malabry, FR;
Assignee:
ALCHIMER, Massy, FR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/285 (2006.01); H01L 21/3205 (2006.01); C23C 18/18 (2006.01); C23C 18/16 (2006.01); C23C 18/34 (2006.01); C23C 18/36 (2006.01); C23C 18/54 (2006.01); H01L 21/28 (2006.01); H01L 21/288 (2006.01); H01L 31/0224 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28518 (2013.01); C23C 18/1607 (2013.01); C23C 18/1639 (2013.01); C23C 18/1642 (2013.01); C23C 18/1692 (2013.01); C23C 18/1696 (2013.01); C23C 18/1879 (2013.01); C23C 18/1882 (2013.01); C23C 18/34 (2013.01); C23C 18/36 (2013.01); C23C 18/54 (2013.01); H01L 21/288 (2013.01); H01L 21/28052 (2013.01); H01L 21/32053 (2013.01); H01L 31/022425 (2013.01);
Abstract
A subject matter of the invention is a process for the formation of nickel silicide or of cobalt silicide, comprising the stages consisting in: The aqueous solution comprises a surface-active agent chosen from the compounds comprising at least one anionic or nonionic polar group and an alkyl chain comprising from 10 to 16 carbon atoms. This process essentially has applications in the manufacture of NAND memories and photovoltaic cells.