The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 24, 2017

Filed:

Feb. 03, 2011
Applicants:

Daisuke Hayashi, Yamanashi, JP;

Koichi Murakami, Yamanashi, JP;

Inventors:

Daisuke Hayashi, Yamanashi, JP;

Koichi Murakami, Yamanashi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); B05B 1/18 (2006.01); C23C 16/00 (2006.01); C23F 1/08 (2006.01);
U.S. Cl.
CPC ...
B05B 1/18 (2013.01); C23C 16/00 (2013.01); C23C 16/455 (2013.01); C23F 1/08 (2013.01);
Abstract

Screwsare inserted from a bottom surface of a ceiling plateand screwed to a base plate, and the ceiling plateand the base plateare press-connected to each other by an elastic restoring force of an elastic memberinterposed between a head of the screwand the ceiling plate. A gap is formed between the head and the ceiling plate. Further, a periphery of the head is covered with a cover via a ring-shaped elastic member. In another embodiment, a periphery of a base plateis protruded from a periphery of a ceiling plate, and the protruded portion of the base plateand a ring-shaped clamp positioned at an outer side of the ceiling plateare joined by screws. Here, an elastic member is interposed between the clamp and the ceiling plate


Find Patent Forward Citations

Hayashi, Daisuke. (2017). Gas shower structure and substrate processing apparatus (U.S. Patent No. 9550194). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9550194

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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