The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2017
Filed:
Nov. 30, 2012
Applicant:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
Gerhard Pohlers, Needham, MA (US);
Cong Liu, Shrewsbury, MA (US);
Cheng-Bai Xu, Southborough, MA (US);
Kevin Rowell, Brighton, MA (US);
Irvinder Kaur, Westborough, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/40 (2006.01); G03F 7/30 (2006.01); G03F 7/09 (2006.01); G03F 7/11 (2006.01); G03F 7/039 (2006.01); C07D 239/26 (2006.01); C07D 241/12 (2006.01); C07D 263/32 (2006.01); C07D 277/22 (2006.01); C07C 309/03 (2006.01); C07C 309/06 (2006.01); C07D 333/48 (2006.01);
U.S. Cl.
CPC ...
G03F 7/40 (2013.01); C07C 309/03 (2013.01); C07C 309/06 (2013.01); C07D 239/26 (2013.01); C07D 241/12 (2013.01); C07D 263/32 (2013.01); C07D 277/22 (2013.01); C07D 333/48 (2013.01); G03F 7/0397 (2013.01); G03F 7/09 (2013.01); G03F 7/091 (2013.01); G03F 7/11 (2013.01); G03F 7/30 (2013.01); G03F 7/405 (2013.01);
Abstract
New ionic thermal acid generator compounds are provided. Also provided are photoresist compositions, antireflective coating compositions, and chemical trim overcoat compositions, and methods of using the compositions.