The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2017
Filed:
Dec. 12, 2014
Applicants:
Rohm and Haas Electronic Materials Llc, Marlborough, MS (US);
Rohm and Haas Electronic Materials Korea Ltd., Chungcheongnam-do, KR;
Inventors:
Li Cui, Westborough, MA (US);
Sung Wook Cho, Gyeonggi-do, KR;
Mingqi Li, Shrewsbury, MA (US);
Shintaro Yamada, Shrewsbury, MA (US);
Peter Trefonas, III, Medway, MA (US);
Robert L. Auger, Midland, MI (US);
Assignees:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/09 (2006.01); C08G 8/08 (2006.01); C09D 161/06 (2006.01); C08G 8/04 (2006.01);
U.S. Cl.
CPC ...
C08G 8/08 (2013.01); C08G 8/04 (2013.01); C09D 161/06 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01);
Abstract
Polymeric reaction products of certain aromatic alcohols with certain aromatic aldehydes are useful as underlayers in semiconductor manufacturing processes.