The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2016
Filed:
Jul. 29, 2009
Andrei Mikhailovich Yakunin, Eindhoven, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Leonid Aizikovitch Sjmaenok, Vaals, NL;
Andrei Mikhailovich Yakunin, Eindhoven, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Leonid Aizikovitch Sjmaenok, Vaals, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A spectral purity filter is configured to transmit extreme ultraviolet (EUV) radiation and deflect or absorb non-EUV secondary radiation. In an embodiment, the spectral purity filter includes a body of material highly transmissive of EUV radiation and a layer of material highly reflective of non-EUV secondary radiation located on a radiation incident side of the body. In an embodiment, the spectral purity filter includes a body of material highly transmissive of EUV radiation and a layer of high emissivity material on an end of the body.