The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Dec. 03, 2013
Kla-tencor Corporation, Milpitas, CA (US);
John Gerling, Livermore, CA (US);
Edward Wagner, San Jose, CA (US);
Mehran Nasser-Ghodsi, Hamilton, MA (US);
Garrett Pickard, Mountain View, CA (US);
Tomas Plettner, San Ramon, CA (US);
Robert Haynes, Pleasanton, CA (US);
Christopher Sears, San Jose, CA (US);
KLA-TENCOR CORPORATION, Milpitas, CA (US);
Abstract
A metrology system is configured to provide visual inspection of a workpiece, three-dimensional magnetic field map, and height measurement. A stage is configured to bring points of interest at the workpiece under the desired tool for measurement. The optical field, magnetic field, and height information can be used independently or together in order to correlate defects in the manufacturing process of the workpiece. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.