The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Nov. 26, 2013
Applicant:
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Inventors:
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/16 (2006.01); H01J 37/28 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01); H01J 37/22 (2006.01); H01J 37/18 (2006.01);
U.S. Cl.
CPC ...
H01J 37/16 (2013.01); H01J 37/18 (2013.01); H01J 37/20 (2013.01); H01J 37/228 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/201 (2013.01); H01J 2237/2003 (2013.01); H01J 2237/2004 (2013.01); H01J 2237/2006 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/24455 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/2608 (2013.01); H01J 2237/2801 (2013.01);
Abstract
This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform.