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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9507274 B1

PDFFull Text
Date of Patent:
Nov. 29, 2016

Filed:

Jan. 17, 2013

Substrate holder and method of manufacturing a substrate holder

Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Raymond Wilhelmus Louis Lafarre, Helmond, NL;

Sjoerd Nicolaas Lambertus Donders, Vught, NL;

Nicolaas Ten Kate, Almkerk, NL;

Nina Vladimirovna Dziomkina, Eindhoven, NL;

Yogesh Pramod Karade, Eindhoven, NL;

Elisabeth Corinne Rodenburg, Heeze, NL;

Assignee:

ASML NETHERLANDS B.V., Veldhoven, NL;

Attorney:

Pillsbury Winthrop Shaw Pittman LLP

Primary Examiner:

Peter B Kim

Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03F 7/20 (2006.01); B23Q 3/18 (2006.01); B05D 3/06 (2006.01); B05D 5/00 (2006.01); B23K 26/00 (2014.01);
U.S. Cl.
CPC ...
G03F 7/70733 (2013.01); B05D 3/06 (2013.01); B05D 5/00 (2013.01); B23K 26/0081 (2013.01); B23K 26/342 (2015.10); B23Q 3/18 (2013.01); G03F 7/20 (2013.01); G03F 7/707 (2013.01); G03F 7/70341 (2013.01); G03F 7/70416 (2013.01); G03F 7/70708 (2013.01); G03F 7/70716 (2013.01);
Abstract

An object holder () for a lithographic apparatus has a main body () having a surface (). A plurality of burls () to support an object are formed on the surface or in apertures of a thin-film stack (). At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.

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Lafarre, Raymond Wilhelmus Louis. (2016). Substrate holder and method of manufacturing a substrate holder (U.S. Patent No. 9507274). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9507274

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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