The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2016
Filed:
Oct. 24, 2013
Kla-tencor Corporation, Milpitas, CA (US);
Chien-Huei Chen, San Jose, CA (US);
Ajay Gupta, San Jose, CA (US);
Thanh Huy Ha, Milpitas, CA (US);
Jianwei Wang, San Jose, CA (US);
Hedong Yang, Santa Clara, CA (US);
Christopher Michael Maher, Campbell, CA (US);
Michael J. Van Riet, Sunnyvale, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
One embodiment relates to a method of inspecting an array of cells on a substrate. A reference image is generated using a cell image that was previously determined to be defect free. A reference contour image which includes contours of the reference image is also generated. The reference contour image is used to detect defects in the array of cells on the substrate. Another embodiment relates to a system for detecting defects in an array on a substrate. Other embodiments, aspects and features are also disclosed.