The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Jun. 30, 2014
Fei Company, Hillsboro, OR (US);
N. William Parker, Hillsboro, OR (US);
Marcus Straw, Portland, OR (US);
Jorge Filevich, Portland, OR (US);
Aurelien Philippe Jean Maclou Botman, Portland, OR (US);
Steven Randolph, Portland, OR (US);
Clive Chandler, Portland, OR (US);
Mark Utlaut, Scappoose, OR (US);
FEI COMPANY, Hillsboro, OR (US);
Abstract
A method and apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column. The charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens that includes a final electrode that is closest to the specimen holding position. This final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.