3d voltage switching transistors for 3d vertical gate memory array

Abstract

The area consumed by switching transistors for a 3D NAND memory array can be reduced with 3D voltage switching transistors with reduced aggregate area in comparison with 2D voltage switching transistors such as transistors in the substrate. The integrated circuit comprises a 3D NAND array of memory transistors; a plurality of bit lines, with different ones of the plurality of bit lines electrically coupled to different parts of the 3D NAND array; and a plurality of transistor pairs with a stack of semiconductor layers. Different layers in the stack of semiconductor layers include different transistor pairs of the plurality of transistor pairs. Each of the plurality of transistor pairs includes first and second transistors with first, second, and third source/drain terminals. The first transistor includes the first and the third source/drain terminals, and the second transistor includes the second and the third source/drain terminals. The first source/drain terminal is electrically coupled to an erase voltage line. The second source/drain terminal is electrically coupled to a corresponding one of a plurality of program/read voltage lines. The third source/drain terminal is electrically coupled to a corresponding one of the plurality of bit lines.