The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Aug. 29, 2014
Fujikin Incorporated, Osaka, JP;
Tokyo Electron Limited, Tokyo, JP;
Eiji Takahashi, Miyagi, JP;
Norikazu Sasaki, Miyagi, JP;
Atsushi Sawachi, Miyagi, JP;
Yohei Sawada, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Kouji Nishino, Osaka, JP;
FUJIKIN INCORPORATED, Osaka, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An apparatus for dividing and supplying gas is provided with a flow rate control device, a plurality of divided flow passages of gas flowing from the flow rate control device, thermal-type mass flow sensors disposed to the divided flow passages, electrically-operated valves disposed on a downstream side of the thermal-type mass flow sensors, controllers that control the electrically-operated valves, and a flow ratio setting calculator that calculates a total flow rate, then calculates flow rates of the divided flow passages, and then inputs the calculated flow rates as set flow rates to each controllers. One of the divided flow passages with the highest set flow rate is put in an uncontrolled state, and opening degree for each of the rest divided flow passages is controlled, and then feedback control of the divided flow rate of each of the divided flow passages is implemented by each of the controllers.