The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2016

Filed:

Mar. 18, 2014
Applicants:

Mihir A. Oka, Chandler, AZ (US);

Edward R. Prack, Phoenix, AZ (US);

Dingying Xu, Chandler, AZ (US);

Saikumar Jayaraman, Chandler, AZ (US);

Inventors:

Mihir A. Oka, Chandler, AZ (US);

Edward R. Prack, Phoenix, AZ (US);

Dingying Xu, Chandler, AZ (US);

Saikumar Jayaraman, Chandler, AZ (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 23/00 (2006.01); H01L 21/02 (2006.01); C09D 179/04 (2006.01); C09D 181/04 (2006.01); C09D 179/08 (2006.01); C08G 73/22 (2006.01);
U.S. Cl.
CPC ...
H01L 24/11 (2013.01); C08G 73/22 (2013.01); C09D 179/04 (2013.01); C09D 179/08 (2013.01); C09D 181/04 (2013.01); H01L 21/02112 (2013.01); H01L 21/02118 (2013.01); H01L 21/02282 (2013.01); H01L 21/02318 (2013.01); H01L 2224/116 (2013.01); H01L 2224/11009 (2013.01); H01L 2224/11849 (2013.01); H01L 2924/095 (2013.01); H01L 2924/12041 (2013.01); H01L 2924/12042 (2013.01);
Abstract

Techniques are disclosed for protecting a surface using a dry-removable protective coating that does not require chemical solutions to be removed. In an embodiment, a protective layer is disposed on a surface. The protective layer is composed of one layer that adheres to the surface. The surface is then processed while the protective coating is on the surface. Thereafter, the protective layer is removed from the surface by separating the protective layer away from the surface without the use of chemical solutions.


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