The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2016

Filed:

May. 06, 2014
Applicant:

Globalfoundries, Inc., Grand Cayman, KY (US);

Inventors:

Bongki Lee, Austin, TX (US);

Jin Ping Liu, Hopewell Junction, NY (US);

Bharat Krishnan, Clifton Park, NY (US);

Assignee:

GLOBALFOUNDRIES, INC., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823842 (2013.01); H01L 29/66 (2013.01); H01L 29/66477 (2013.01);
Abstract

Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a method is provided for fabricating an integrated circuit. The method includes forming a first FET trench in a first FET region and a second FET trench in a second FET region of an interlayer dielectric material on a semiconductor substrate, at least partially filling the first and second FET trenches with a work function metal to form a work function metal layer, and at least partially removing a portion of the work function metal layer in the second FET trench. The first FET trench is defined as an NFET trench and the second FET trench is defined as a PFET trench.


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