logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9466660 B1

PDFFull Text
Date of Patent:
Oct. 11, 2016

Filed:

Oct. 16, 2013

Semiconductor structures including molybdenum nitride, molybdenum oxynitride or molybdenum-based alloy material, and method of making such structures

Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Matthew N. Rocklein, Boise, ID (US);

Kotha Sai Madhukar Reddy, Boise, ID (US);

Vassil Antonov, Boise, ID (US);

Vishwanath Bhat, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:

TraskBritt

Primary Examiner:

Marc Armand

Assistant Examiner:

Sarah Salerno

Int. Cl.
CPC ...
H01L 29/12 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 28/60 (2013.01); H01L 28/40 (2013.01);
Abstract

A semiconductor structure may include a first electrode over a substrate, a high-K dielectric material over the first electrode, and a second electrode over the high-K dielectric material, wherein at least one of the first electrode and the second electrode may include a material selected from the group consisting of a molybdenum nitride (MoN) material, a molybdenum oxynitride (MoON) material, a molybdenum oxide (MoO) material, and a molybdenum-based alloy material comprising molybdenum and nitrogen.

Find Patent Forward Citations

Rocklein, Matthew. (2016). Semiconductor structures including molybdenum nitride, molybdenum oxynitride or molybdenum-based alloy material, and method of making such structures (U.S. Patent No. 9466660). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9466660

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…