The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Mar. 12, 2014
Applicants:
Japan Electronic Materials Corporation, Amagasaki-shi, Hyogo, JP;
Shinko Electric Industries Co., Ltd., Nagano-shi, Nagano, JP;
Inventors:
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/073 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07357 (2013.01);
Abstract
The invention provides a guide plate for a probe card including a silicon substrate including a surface and a through-hole, an edge part of the through-hole, and a curved-face part. The through-hole is configured to guide a probe and includes an inner wall face. The edge part of the through-hole is constituted by the surface of the silicon substrate and the inner wall face of the through-hole. The curved-face part is formed on the edge part and formed of a silicon dioxide film.