The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
Jul. 09, 2015
Sandisk 3d Llc, Milpitas, CA (US);
Kan Fujiwara, Yokkaichi, JP;
Takuya Futase, Nagoya, JP;
Toshihiro Iizuka, Yokkaichi, JP;
Shin Kikuchi, Nagoya, JP;
Yoichiro Tanaka, Nagoya, JP;
Akio Nishida, Nagoya, JP;
Christopher J Petti, Mountain View, CA (US);
SanDisk Technologies LLC, Plano, TX (US);
Abstract
A three-dimensional (3D) non-volatile memory array having a silicide bit line and method of fabricating is disclosed. The fabrication technique may comprise forming a metal silicide for at least a portion of the bit line. The device has reversible resistivity material between the word lines and the bit lines. The reversible resistivity material may be a metal oxide. The metal that is used to form the silicide may serve as an oxygen scavenger to draw oxygen away from the silicon, thus preventing formation of silicon oxide between the reversible resistivity material and the bit line. The metal silicide may also help prevent formation of a depletion layer in silicon in the bit line.