The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2016

Filed:

Jun. 03, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Ronald G. Filippi, Wappingers Falls, NY (US);

Jason P. Gill, Essex, VT (US);

Vincent J. McGahay, Poughkeepsie, NY (US);

Paul S. McLaughlin, Poughkeepsie, NY (US);

Conal E. Murray, Yorktown Heights, NY (US);

Hazara S. Rathore, Stormville, NY (US);

Thomas M. Shaw, Peekskill, NY (US);

Ping-Chuan Wang, Hopewell Junction, NY (US);

Assignee:

GlobalFoundries, Inc., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/66 (2006.01); H01L 23/522 (2006.01); H05K 1/09 (2006.01); H05K 1/02 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); H01L 22/32 (2013.01); H01L 23/5226 (2013.01); H01L 23/562 (2013.01); H01L 2924/0002 (2013.01); H05K 1/0268 (2013.01); H05K 1/0269 (2013.01); H05K 1/092 (2013.01); Y10S 438/927 (2013.01); Y10T 29/49004 (2015.01);
Abstract

A test structure used to determine reliability performance includes a patterned metallization structure having multiple interfaces, which provide stress risers. A dielectric material surrounds the metallization structure, where a mismatch in coefficients of thermal expansion (CTE) between the metallization structure and the surrounding dielectric material exist such that a thermal strain value is provided to cause failures under given stress conditions as a result of CTE mismatch to provide a yield indicative of reliability for a manufacturing design.


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