The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
May. 16, 2013
Dong Chen, Tucson, AZ (US);
Bryan Guenther, Tucson, AZ (US);
Henry Fagg, Tucson, AZ (US);
Jaime Duran, Tucson, AZ (US);
Dong Chen, Tucson, AZ (US);
Bryan Guenther, Tucson, AZ (US);
Henry Fagg, Tucson, AZ (US);
Jaime Duran, Tucson, AZ (US);
BRUKER NANO INC., Santa Barbara, CA (US);
Abstract
A conductive conformable braided wire is used as the edge electrode for material characterization of a semiconductor wafer. The braided wire is adapted to contact the perimeter of the n-GaN layer using a retractable support structure that alternately places the electrode in contact with the edge of the n-GaN layer and retracts it during repeated cycles of operation to test a plurality of similar wafers. The braided wire produced a very stable and higher electrical contact than any prior-art edge electrode.