The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Apr. 30, 2009
Vadim Yevgenyevich Banine, Deurne, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Vladimir Mihailovitch Krivtsun, Moscow Reg., RU;
Vadim Yevgenyevich Banine, Deurne, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Vladimir Mihailovitch Krivtsun, Moscow Reg., RU;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A radiation system is configured to generate a radiation beam. The radiation system includes a radiation source configured to generate a plasma that emits radiation and debris, and a radiation collector configured to direct collected radiation to a radiation beam emission aperture. A magnetic field generator is configured to generate a magnetic field with a gradient in magnetic field strength to direct the plasma away from the radiation collector.