The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 19, 2016

Filed:

Jan. 21, 2015
Applicant:

Avogy, Inc., San Jose, CA (US);

Inventors:

Madhan M. Raj, Cupertino, CA (US);

Brian Alvarez, Oceanside, CA (US);

David P. Bour, Cupertino, CA (US);

Andrew P. Edwards, San Jose, CA (US);

Hui Nie, Cupertino, CA (US);

Isik C. Kizilyalli, San Francisco, CA (US);

Assignee:

Avogy, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/328 (2006.01); H01L 21/329 (2006.01); H01L 29/868 (2006.01); H01L 29/872 (2006.01); H01L 29/66 (2006.01); H01L 29/06 (2006.01); H01L 29/20 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66143 (2013.01); H01L 21/0254 (2013.01); H01L 21/02664 (2013.01); H01L 29/0619 (2013.01); H01L 29/2003 (2013.01); H01L 29/66121 (2013.01); H01L 29/66212 (2013.01); H01L 29/872 (2013.01);
Abstract

An MPS diode includes a III-nitride substrate characterized by a first conductivity type and a first dopant concentration and having a first side and a second side. The MPS diode also includes a III-nitride epitaxial structure comprising a first III-nitride epitaxial layer coupled to the first side of the substrate, wherein a region of the first III-nitride epitaxial layer comprises an array of protrusions. The III-nitride epitaxial structure also includes a plurality of III-nitride regions of a second conductivity type, each partially disposed between adjacent protrusions. Each of the plurality of III-nitride regions of the second conductivity type comprises a first section laterally positioned between adjacent protrusions and a second section extending in a direction normal to the first side of the substrate. The MPS diode further includes a first metallic structure electrically coupled to one or more of the protrusions and to one or more of the second sections.


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