The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Dec. 22, 2010
Yuji Takagi, Kamakura, JP;
Minoru Harada, Fujisawa, JP;
Ryo Nakagaki, Kawasaki, JP;
Naoki Hosoya, Tokyo, JP;
Toshifumi Honda, Yokohama, JP;
Takehiro Hirai, Ushiku, JP;
Yuji Takagi, Kamakura, JP;
Minoru Harada, Fujisawa, JP;
Ryo Nakagaki, Kawasaki, JP;
Naoki Hosoya, Tokyo, JP;
Toshifumi Honda, Yokohama, JP;
Takehiro Hirai, Ushiku, JP;
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Abstract
In performing a programmed-point inspection of a circuit pattern using a review SEM, stable inspection can be performed while suppressing the generation of a false report even when a variation in a circuit pattern to be inspected is large. SEM images that are obtained by sequentially imaging a predetermined circuit pattern using the review SEM are stored into a storage unit. Images that meet a set condition are selected from the stored SEM images, and averaged to create an average image (GP image). By performing pattern check by GP comparison using this GP image, an inspection can be performed while suppressing the generation of a false report even when a variation in the circuit patterns is large.