The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Sep. 27, 2013
James M. Blackwell, Portland, OR (US);
Scott B. Clendenning, Portland, OR (US);
John J. Plombon, Portland, OR (US);
Patricio E. Romero, Portland, OR (US);
James M. Blackwell, Portland, OR (US);
Scott B. Clendenning, Portland, OR (US);
John J. Plombon, Portland, OR (US);
Patricio E. Romero, Portland, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
A metal precursor and a method comprising decomposing a metal precursor on an integrated circuit device; and forming a metal from the metal precursor, wherein the metal precursor is selected from the group consisting of (i) a Co(CO)(RC≡CR), wherein Rand Rare individually selected from a straight or branched monovalent hydrocarbon group have one to six carbon atoms that may be interrupted and substituted; (ii) a mononuclear cobalt carbonyl nitrosyl; (iii) a cobalt carbonyl bonded to one of a boron, indium, germanium and tin moiety; (iv) a cobalt carbonyl bonded to a mononuclear or binuclear allyl; and (v) a cobalt(II) complex comprising nitrogen-based supporting ligands.