The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Dec. 10, 2008
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Johan Hendrik Geerke, Eindhoven, NL;
Peter Paul Hempenius, Nuenen, NL;
Youssef Karel Maria DE Vos, Lille, BE;
Joost DE Pee, Veldhoven, NL;
Clementius Andreas Johannes Beijers, Eindhoven, NL;
Nicolaas Bernardus Roozen, Heeze, NL;
Erwin Antonius Henricus Fransiscus Van Den Boogaert, Someren-Eind, NL;
Marco Hendrikus Hermanus Oude Nijhuis, Eindhoven, NL;
Francois Xavier Debiesme, Weert, NL;
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van der Wijst, Veldhoven, NL;
Johan Hendrik Geerke, Eindhoven, NL;
Peter Paul Hempenius, Nuenen, NL;
Youssef Karel Maria De Vos, Lille, BE;
Joost De Pee, Veldhoven, NL;
Clementius Andreas Johannes Beijers, Eindhoven, NL;
Nicolaas Bernardus Roozen, Heeze, NL;
Erwin Antonius Henricus Fransiscus Van den Boogaert, Someren-Eind, NL;
Marco Hendrikus Hermanus Oude Nijhuis, Eindhoven, NL;
Francois Xavier Debiesme, Weert, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A lithographic apparatus is arranged to transfer a pattern from a patterning device onto a substrate. The lithographic apparatus includes an acoustical sensor to measure a first acoustic vibration in a sensor measurement area in the lithographic apparatus. An actuator is provided to generate a second acoustic vibration in at least an area of the lithographic apparatus. Further, a control device is provided having a sensor input to receive a sensor signal of the acoustical sensor and an actuator output to provide an actuator drive signal to the actuator. The control device is arranged to drive the actuator so as to let the second acoustic vibration at least partly compensate in the area the first acoustic vibration.