The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Aug. 01, 2012
Andrei Mikhailovich Yakunin, Mierlo, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
Viacheslav Medvedev, Moscow, RU;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Jan Bernard Plechelmus Van Schoot, Eindhoven, NL;
Andrei Mikhailovich Yakunin, Mierlo, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
Viacheslav Medvedev, Moscow, RU;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Jan Bernard Plechelmus Van Schoot, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source () suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle configured to direct a stream of fuel droplets () along a trajectory () towards a plasma formation location (). The radiation source is configured to receive a first amount of radiation () such that the first amount of radiation is incident on a fuel droplet () at the plasma formation location, and such that the first amount of radiation transfers energy into the fuel droplet to generate a modified fuel distribution (), the modified fuel distribution having a surface. The radiation source is also configured to receive a second amount of radiation () such that the second amount of radiation is incident on a portion of the surface () of the modified fuel distribution, the second amount of radiation having a p-polarized component with respect to the portion of the surface; and such that the second amount of radiation transfers energy to the modified fuel distribution to generate a radiation generating plasma, the radiation generating plasma emitting a third amount of radiation (). The radiation source further comprises a collector (CO) configured to collect and direct at least a portion of the third amount of radiation. The radiation source is configured such that the second amount of radiation propagates in a first direction, the first direction being non-parallel to a normal to the portion of the surface of the modified fuel distribution.