The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Mar. 29, 2012
Chia-pao Shu, New Taipei, TW;
Wen-chuan Tai, Dayuan Township, Taoyuan County, TW;
Chia-ming Hung, Taipei, TW;
Hsiang-fu Chen, Jhudong Township, Hsinchu County, TW;
Chia-Pao Shu, New Taipei, TW;
Wen-Chuan Tai, Dayuan Township, Taoyuan County, TW;
Chia-Ming Hung, Taipei, TW;
Hsiang-Fu Chen, Jhudong Township, Hsinchu County, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
The present disclosure provides one embodiment of a motion sensor structure. The motion sensor structure includes a first substrate having an integrated circuit formed thereon; a second substrate bonded to the first substrate from a first surface, wherein the second substrate includes a motion sensor formed thereon; and a third substrate bonded to a second surface of the second substrate, wherein the third substrate includes a recessed region aligned with the motion sensor.