The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Apr. 27, 2012
Alrik Van Den Brom, Utrecht, NL;
Stijn Willem Herman Karel Steenbrink, The Hague, NL;
Marco Jan-jaco Wieland, Delft, NL;
Guido DE Boer, Leerdam, NL;
Pieter Kappelhof, Delft, NL;
Alrik van den Brom, Utrecht, NL;
Stijn Willem Herman Karel Steenbrink, The Hague, NL;
Marco Jan-Jaco Wieland, Delft, NL;
Guido De Boer, Leerdam, NL;
Pieter Kappelhof, Delft, NL;
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Abstract
The invention relates to a charged particle system for processing a target surface with at least one charged particle beam. The system comprises an optical column with a beam generator module for generating a plurality of charged particle beams, a beam modulator module for switching on and off said plurality of beams and a beam projector module for projecting beams or subbeams on said target surface. The system further comprises a frame supporting each of said modules in a fixed position and alignment elements for aligning at least one of beams and/or subbeams with a downstream module element.