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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9360863 B1

PDFFull Text
Date of Patent:
Jun. 07, 2016

Filed:

Jun. 09, 2011

Data perturbation for wafer inspection or metrology setup using a model of a difference

Applicants:

Govind Thattaisundaram, Santa Clara, CA (US);

Mohan Mahadevan, Livermore, CA (US);

Ajay Gupta, San Jose, CA (US);

Chien-huei Adam Chen, San Jose, CA (US);

Ashok Kulkarni, San Jose, CA (US);

Jason Kirkwood, Santa Clara, CA (US);

Kenong Wu, Davis, CA (US);

Songnian Rong, San Jose, CA (US);

Inventors:

Govind Thattaisundaram, Santa Clara, CA (US);

Mohan Mahadevan, Livermore, CA (US);

Ajay Gupta, San Jose, CA (US);

Chien-Huei Adam Chen, San Jose, CA (US);

Ashok Kulkarni, San Jose, CA (US);

Jason Kirkwood, Santa Clara, CA (US);

Kenong Wu, Davis, CA (US);

Songnian Rong, San Jose, CA (US);

Assignee:

KLA-Tencor Corp., Milpitas, CA (US);

Attorney:

Ann Marie Mewherter

Primary Examiner:

Thuan Do

Int. Cl.
CPC ...
G06F 17/50 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G05B 19/41875 (2013.01); G05B 2219/32182 (2013.01); G05B 2219/45031 (2013.01);
Abstract

Various embodiments for determining parameters for wafer inspection and/or metrology are provided.

Find Patent Forward Citations

Thattaisundaram, Govind. (2016). Data perturbation for wafer inspection or metrology setup using a model of a difference (U.S. Patent No. 9360863). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9360863

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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