The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Jun. 09, 2011
Applicants:
Govind Thattaisundaram, Santa Clara, CA (US);
Mohan Mahadevan, Livermore, CA (US);
Ajay Gupta, San Jose, CA (US);
Chien-huei Adam Chen, San Jose, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Jason Kirkwood, Santa Clara, CA (US);
Kenong Wu, Davis, CA (US);
Songnian Rong, San Jose, CA (US);
Inventors:
Govind Thattaisundaram, Santa Clara, CA (US);
Mohan Mahadevan, Livermore, CA (US);
Ajay Gupta, San Jose, CA (US);
Chien-Huei Adam Chen, San Jose, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Jason Kirkwood, Santa Clara, CA (US);
Kenong Wu, Davis, CA (US);
Songnian Rong, San Jose, CA (US);
Assignee:
KLA-Tencor Corp., Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G05B 19/41875 (2013.01); G05B 2219/32182 (2013.01); G05B 2219/45031 (2013.01);
Abstract
Various embodiments for determining parameters for wafer inspection and/or metrology are provided.