The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Jun. 30, 2015
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Michael Budach, Hanau, DE;
Christof Baur, Darmstadt, DE;
Dajana Cujas, Seeheim-Jugenheim, DE;
Robert Heberlein, Hemsbach, DE;
Marion Batz, Wiesbaden, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by use of the electron beam; (b) at least one scanning unit operable to scan a particle beam of the scanning particle microscope across at least one portion of the reference object; and (c) at least one setting unit operable to change at least one setting of the scanning particle microscope.