The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Feb. 03, 2012
Applicants:
Christoph Simons, Biebergemünd, DE;
Martin Schlott, Offenbach, DE;
Josef Heindel, Hainburg, DE;
Christoph Stahr, Kahl Am Main, DE;
Inventors:
Christoph Simons, Biebergemünd, DE;
Martin Schlott, Offenbach, DE;
Josef Heindel, Hainburg, DE;
Christoph Stahr, Kahl Am Main, DE;
Assignee:
Heraeus Deutschland GmbH & Co. KG, Hanau, DE;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C22C 28/00 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); C22C 28/00 (2013.01); C23C 14/3407 (2013.01); H01J 37/342 (2013.01); H01J 37/3426 (2013.01); Y02E 10/541 (2013.01); Y10T 428/12396 (2015.01);
Abstract
A tube-shaped sputtering target is provided having a carrier tube and an indium-based sputtering material arranged on the carrier tube. The sputtering material has a microstructure having a mean grain size of less than 1 mm, measured as the mean diameter of the grains on the sputtering-roughened surface of the sputtering material.