The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 26, 2016

Filed:

Jun. 02, 2014
Applicants:

Dcg Systems, Inc., Fremont, CA (US);

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., München, DE;

Inventors:

Frank Altmann, Halle, DE;

Christian Schmidt, Halle, DE;

Rudolf Schlangen, San Francisco, CA (US);

Herve Deslandes, Sunnyvale, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/00 (2006.01); G01R 31/311 (2006.01); G01N 1/00 (2006.01); G01N 25/00 (2006.01); G01N 21/88 (2006.01); G01N 21/35 (2014.01); G01N 21/84 (2006.01);
U.S. Cl.
CPC ...
G01J 5/0066 (2013.01); G01N 1/00 (2013.01); G01N 21/88 (2013.01); G01N 25/00 (2013.01); G01R 31/311 (2013.01); G01J 2005/0077 (2013.01); G01J 2005/0085 (2013.01); G01N 21/35 (2013.01); G01N 2021/8461 (2013.01);
Abstract

A non-destructive approach for the 3D localization of buried hot spots in electronic device architectures by use of Lock-in Thermography (LIT). The 3D analysis is based on the principles of thermal wave propagation through different material layers and the resulting phase shift/thermal time delay. With more complex multi level stacked die architectures it is necessary to acquire multiple LIT results at different excitation frequencies for precise hot spot depth localization. Additionally, the use of multiple time-resolved thermal waveforms, measured in a minimized field of view on top of the hot spot location, can be used to speed up the data acquisition. The shape of the resulting waveforms can be analyzed to further increase the detection accuracy and confidence level.


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