The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Mar. 29, 2012
Applicants:
Jani Hamalainen, Espoo, FI;
Jani Holopainen, Helsinki, FI;
Timo Hatanpaa, Espoo, FI;
Mikko Ritala, Espoo, FI;
Markku Leskela, Espoo, FI;
Inventors:
Jani Hamalainen, Espoo, FI;
Jani Holopainen, Helsinki, FI;
Timo Hatanpaa, Espoo, FI;
Mikko Ritala, Espoo, FI;
Markku Leskela, Espoo, FI;
Assignee:
ASM IP HOLDING B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/06 (2006.01); C23C 16/08 (2006.01); C23C 16/18 (2006.01); C23C 16/30 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
C23C 16/08 (2013.01); C23C 16/18 (2013.01); C23C 16/30 (2013.01); C23C 16/50 (2013.01);
Abstract
The present application relates to atomic layer deposition (ALD) processes for producing metal phosphates such as titanium phosphate, aluminum phosphate and lithium phosphate, as well as to ALD processes for depositing lithium silicates.