The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Sep. 11, 2012
Kenong Wu, Davis, CA (US);
Chris W. Lee, Fremont, CA (US);
Michael J. Van Riet, Sunnyvale, CA (US);
Yi Liu, Milpitas, CA (US);
Kenong Wu, Davis, CA (US);
Chris W. Lee, Fremont, CA (US);
Michael J. Van Riet, Sunnyvale, CA (US);
Yi Liu, Milpitas, CA (US);
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for a defect detection method are provided. One method includes selecting one or more parameters of a defect detection method using an optimization function and information for a set of classified defects, which includes defects of interest and nuisance defects, such that the one or more parameters satisfy an objective for the defect detection method.