The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2016

Filed:

Nov. 14, 2011
Applicants:

Weng Hong Teh, Phoenix, AZ (US);

Shan Zhong, Chandler, AZ (US);

Inventors:

Weng Hong Teh, Phoenix, AZ (US);

Shan Zhong, Chandler, AZ (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/52 (2006.01); H01L 29/40 (2006.01); H01L 23/538 (2006.01); H01L 21/82 (2006.01); H01L 23/498 (2006.01); H01L 23/00 (2006.01); H01L 25/065 (2006.01); H01L 25/00 (2006.01); H01L 25/10 (2006.01); H01L 25/18 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5384 (2013.01); H01L 21/82 (2013.01); H01L 23/49811 (2013.01); H01L 23/5389 (2013.01); H01L 24/03 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/14 (2013.01); H01L 24/92 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H01L 23/49816 (2013.01); H01L 24/16 (2013.01); H01L 25/105 (2013.01); H01L 25/18 (2013.01); H01L 2224/0331 (2013.01); H01L 2224/0346 (2013.01); H01L 2224/0348 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/0557 (2013.01); H01L 2224/05541 (2013.01); H01L 2224/05571 (2013.01); H01L 2224/1147 (2013.01); H01L 2224/11849 (2013.01); H01L 2224/131 (2013.01); H01L 2224/13023 (2013.01); H01L 2224/13082 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/17181 (2013.01); H01L 2224/81193 (2013.01); H01L 2224/9202 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06548 (2013.01); H01L 2924/00014 (2013.01);
Abstract

A process of bumping a die backside includes opening a recess in a die backside film (DBF) to expose a through-silicon via (TSV) contact in a die, followed by filling the recess with a conductive material that contacts the TSV contact. Added solder is coupled to the conductive material at a level of the DBF. A subsequent die is coupled to the first die at the added solder to form an electrical coupling consisting of the TSV contact, the conductive material, and the added solder, an electrical bump coupled to the subsequent die. Apparatus and computer systems are assembled using the process.


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