The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2016

Filed:

Aug. 06, 2013
Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Masashi Shimoyama, Tokyo, JP;

Yuji Araki, Tokyo, JP;

Fumio Kuriyama, Tokyo, JP;

Jumpei Fujikata, Tokyo, JP;

Assignee:

Ebara Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 5/18 (2006.01); C25D 5/02 (2006.01); C25D 5/20 (2006.01); C25D 17/18 (2006.01); C25D 21/10 (2006.01); C25D 21/12 (2006.01); H01L 21/768 (2006.01); H01L 21/288 (2006.01); C25D 5/10 (2006.01); C25D 17/00 (2006.01);
U.S. Cl.
CPC ...
C25D 5/18 (2013.01); C25D 5/02 (2013.01); C25D 5/10 (2013.01); C25D 17/001 (2013.01); C25D 21/10 (2013.01); C25D 21/12 (2013.01); H01L 21/2885 (2013.01); H01L 21/76898 (2013.01);
Abstract

There is provided an electroplating method for a through-hole. The method includes: a first plating process, a second plating process, and a third plating process. The first plating process is a plating process of forming a metal film with a uniform thickness in the through-hole to reduce a diameter of the through-hole, the second plating process is a plating process of blocking up a central portion of the through-hole with the metal film using a PR pulsed current, and the third plating process is a plating process of completely filling the through-hole with the metal film using the plating current whose value is equal to or larger than a forward-current value of the PR pulsed current used in the second plating process.


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