The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2016
Filed:
Jul. 16, 2009
Vadim Yevgenyevich Banine, Deurne, NL;
Leonid Aizikovitch Sjmaenok, Vaals, NL;
Andrei Mikhailovich Yakunin, Eindhoven, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Leonid Aizikovitch Sjmaenok, Vaals, NL;
Andrei Mikhailovich Yakunin, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Embodiments of the invention relate to a mirror (). The mirror includes a mirroring surface and a profiled coating layer () having an outer surface, wherein one or more wedged elements are formed by the outer surface with respect to the mirroring surface, and wherein the one or more wedged elements having a wedge angle (ø) in a range of approximately 10-200 mrad. The profiled coating layer may have a curved outer surface. The profiled coating layer may be formed from at least one of the following materials: Be, B, C, P, K, Ca, Sc, Br, Rb, Sr, Y, Zr, Ru, Nb, Mo, Ba, La, Ce, Pr, Pa and U.