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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9281356 B1

PDFFull Text
Expired
Date of Patent:
Mar. 08, 2016

Filed:

Dec. 30, 2014

Integrated circuit resistor

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

King-Yuen Wong, Hsin-Chu, TW;

Chia-Pin Lin, Hsin-Chu, TW;

Chia-Yu Lu, Hsin-Chu, TW;

Yi-Cheng Tsai, Hsin-Chu, TW;

Da-Wen Lin, Hsin-Chu, TW;

Kuo-Feng Yu, Hsin-Chu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Attorney:

Haynes and Boone, LLP

Primary Examiner:

Stephen W Smoot

Assistant Examiner:

Edward Chin

Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 27/06 (2006.01); H01L 29/8605 (2006.01); H01L 21/265 (2006.01); H01L 21/02 (2006.01); H01L 21/8234 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 28/20 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/02595 (2013.01); H01L 21/26506 (2013.01); H01L 21/26513 (2013.01); H01L 21/823437 (2013.01); H01L 27/0629 (2013.01); H01L 29/8605 (2013.01); H01L 29/66545 (2013.01);
Abstract

A method of fabricating a semiconductor device is disclosed. The method includes providing a substrate including an isolation region, forming a resistor over the isolation region, and forming a contact over the resistor. The method also includes implanting with a dopant concentration that is step-increased at a depth of the resistor and that remains substantially constant as depth increases.

Find Patent Forward Citations

Wong, King-Yuen. (2016). Integrated circuit resistor (U.S. Patent No. 9281356). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9281356

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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