The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Jul. 04, 2012
Applicants:
Takehiro Hirai, Tokyo, JP;
Kenji Obara, Tokyo, JP;
Kozo Miyake, Tokyo, JP;
Inventors:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06T 7/00 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01); H01J 2237/2817 (2013.01);
Abstract
The charged particle beam apparatus automatically judges the good or bad of an observation object on the basis of information obtained from an image of the observation object on a wafer; displays a judgment result on a screen; displays the observation object, extracted from the judgment result, that requires to be corrected on the basis of the good or bad of the observation object from a user; and corrects the judgment result to the extracted and displayed observation object on the basis of an instruction from the user.