The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Apr. 11, 2013
Hitachi High-technologies Corporation, Tokyo, JP;
Yusuke Ominami, Tokyo, JP;
Shinsuke Kawanishi, Tokyo, JP;
Tomohisa Ohtaki, Tokyo, JP;
Masahiko Ajima, Tokyo, JP;
Sukehiro Ito, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A charged particle beam device () includes a charged particle optical lens barrel (), a support housing () equipped with the charged particle optical lens barrel () thereon, and an insertion housing () inserted in the support housing (). A first aperture member () is disposed in the vicinity of the center of the magnetic field of an objective lens, and a second aperture member () is disposed so as to externally close an opening part provided at the upper side of the insertion housing (). Further, when a primary charged particle beam () is irradiated to a sample () arranged under the lower side of the second aperture member (), secondary charged particles thus emitted are detected by a detector ().