The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Feb. 27, 2014
Applicant:
Carl Zeiss Sms Gmbh, Jena, DE;
Inventors:
Anthony Garetto, Jena, DE;
Thomas Scheruebl, Jena, DE;
Gilles Tabbone, Jena, DE;
Vahagn Sargsyan, Boise, ID (US);
Doug Uzzel, Nampa, ID (US);
Jon Morgan, Nampa, ID (US);
Assignee:
Carl Zeiss SMS GmbH, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G03F 1/84 (2012.01);
U.S. Cl.
CPC ...
G03F 1/84 (2013.01);
Abstract
A method for analyzing a photomask comprises the determination of a Bossung plot.