The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
May. 18, 2010
Anthony Zampini, Westborough, MA (US);
Gerald B. Wayton, Leicester, MA (US);
Vipul Jain, Westborough, MA (US);
Cong Liu, Shrewsbury, MA (US);
Suzanne Coley, Mansfield, MA (US);
Owendi Ongayi, Marlborough, MA (US);
Anthony Zampini, Westborough, MA (US);
Gerald B. Wayton, Leicester, MA (US);
Vipul Jain, Westborough, MA (US);
Cong Liu, Shrewsbury, MA (US);
Suzanne Coley, Mansfield, MA (US);
Owendi Ongayi, Marlborough, MA (US);
Rohm and Haas Electronic Materials, LLC, Marlborough, MA (US);
Abstract
Coating compositions for use with an overcoated photoresist are provided where the coating composition comprises a resin containing cyanurate groups and hydrophobic groups. The coating composition can enhance resolution of an overcoated photoresist relief image.