The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
May. 02, 2013
Applicant:
Macronix International Co., Ltd., Hsinchu, TW;
Inventors:
Assignee:
Macronix International Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01); H01L 29/06 (2006.01); H01L 23/485 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 29/06 (2013.01); H01L 21/76816 (2013.01); H01L 23/485 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A small contact hole having a large aspect ratio is formed by employing a stop layer with a trench formed therein. A relatively large contact hole is formed above the trench, and the small contact hole is formed below the trench, using properties of the trench and the stop layer to limit the size of the small contact hole.