The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2015
Filed:
May. 31, 2011
Toshihide Endoh, Suzuka, JP;
Masayuki Tebakari, Saitama, JP;
Toshiyuki Ishii, Yokkaichi, JP;
Masaaki Sakaguchi, Suzuka, JP;
Toshihide Endoh, Suzuka, JP;
Masayuki Tebakari, Saitama, JP;
Toshiyuki Ishii, Yokkaichi, JP;
Masaaki Sakaguchi, Suzuka, JP;
MITSUBISHI MATERIALS CORPORATION, Tokyo, JP;
Abstract
In a reactor cleaning apparatuswhich cleans an inner wall surfaceof a reactorwhich generates polycrystalline silicon, a bell jar of the reactorhas a dual structure, a through holeis formed along a vertical direction at a central portion of a substantially disc-like trayplaced in a horizontal state, a flange portionin which an opening edge of the reactoris placed is formed at an outer peripheral portion of the tray, a shaftis provided through the through holeof the trayso as to be rotatable and movable in the vertical direction, a nozzle devicewhich sprays a cleaning water at high pressure in three-dimensional directions is provided at an upper end of the shaft, a drive mechanismwhich rotates the shaftand moves the shaft in the vertical direction is provided at a base end of the shaft, and steam pipingcapable of supplying the steam within the bell jar of the reactoris provided.