The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Feb. 15, 2013
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Yusuke Ominami, Tokyo, JP;
Takashi Ohshima, Tokyo, JP;
Hiroyuki Ito, Tokyo, JP;
Mitsugu Sato, Tokyo, JP;
Sukehiro Ito, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Provided is a charged particle beam apparatus () to and from which a diaphragm () can be easily attached and detached, and in which a sample () can be arranged under vacuum and under high pressure. The charged particle beam apparatus includes: a lens barrel () holding a charged particle source () and an electron optical system (); a first housing () connected to the lens barrel (); a second housing () recessed to inside the first housing (); a first diaphragm () separating the space inside the lens barrel () and the space inside the first housing (), and through which the charged particle beam passes; a second diaphragm () separating the spaces inside and outside the recessed section () in the second housing (), and through which the charged particle beam passes; and a pipe () connected to a third housing () accommodating the charged particle source (). The first diaphragm () is attached to the pipe (), and the pipe () and the third housing () can be attached to and detached from the lens barrel () in the direction of the optical axis (). A space () surrounded by the first housing () and the second housing () is depressurized, and the sample () arranged inside the recessed section () is irradiated with a charged particle beam.