The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Jul. 07, 2011
Takashi Ohshima, Saitama, JP;
Michio Hatano, Tokyo, JP;
Hideo Morishita, Hachioji, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The present invention provides an electron beam apparatus comprising a means for visualizing an axial displacement of a retarding electric field, and a means for adjusting axial displacement. The axial displacement visualizing means includes a reflective plate (), and an optical system () for converging a secondary electron beam () on the reflective plate (), and the axial displacement adjusting means includes an incline rotation mechanism () for a sample stage (). With this configuration, in electron beam apparatuses such as SEM and the like, such problems as visual field displacement caused by displacement of the axial symmetry of the electric field between an objective lens () and a sample () and inability to measure secondary electrons and reflected electrons that provide desired information can be eliminated.