The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Dec. 17, 2014
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Bart Jozef Janssen, Eindhoven, NL;
Gijs van Duinen, Utrecht, NL;
Uwe Luecken, Eindhoven, NL;
Ross Savage, Eindhoven, NL;
Stephanus H.L. van den Boom, Geldrop, NL;
Ivan Lazic, Eindhoven, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01); H01J 37/28 (2006.01); H01J 37/26 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01); H01J 37/295 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/265 (2013.01); H01J 37/295 (2013.01); H01J 2237/12 (2013.01); H01J 2237/14 (2013.01); H01J 2237/226 (2013.01); H01J 2237/24507 (2013.01); H01J 2237/2614 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2806 (2013.01);
Abstract
A method of investigating a wavefront of a charged-particle beam that is directed from a source through an illuminator so as to traverse a sample plane and land upon a detector, an output of the detector being used in combination with a mathematical reconstruction technique so as to calculate at least one of phase information and amplitude information for the wavefront at a pre-defined location along its path to the detector, in which method: